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Product Details
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Product Details
REDUCED PRESSURE DIFFUSION FURNACE
Description
Semco – Inventor Reduced Pressure PV Diffusion
For Phosphorus POCL3 & Boron BCl3 & LPCVD.
For PERC, TOPCon, Bifacial, IBC Technolgies
Wafer size - M3-M6 or M6-M12.
Stress free wafer processing
Thin Wafer Compliant
Easy wafer loading
No wafer scratching
Excellent gas flow control along load
No more dummy wafers