Product Details

REDUCED PRESSURE DIFFUSION FURNACE

Description

Semco – Inventor Reduced Pressure PV Diffusion

For Phosphorus POCL3 & Boron BCl3 & LPCVD.
For PERC, TOPCon, Bifacial, IBC Technolgies
Wafer size - M3-M6 or M6-M12.
Stress free wafer processing
Thin Wafer Compliant
Easy wafer loading
No wafer scratching
Excellent gas flow control along load
No more dummy wafers