1.WAFER SURFACE DRY CLEAN/MODIFICATION
2.SURFACE ORGANIC CONTAMINATION REMOVAL
3.PTOTORESIST REMOVAL
4.SURFACE WETTABILITY IMPROVEMENT
ITEM
SPECIFICATION
M/C SIZE
600X550X780cm(WXDXH)
POWER REQUIRED
220V /1PHASE/20A
UTILITY REQUIRED
OXYGEN 50SLM / NITROGEN 50SLM /EXHAUST 80CMM
HEATING STAGE/TEMP.
OPTION /300℃
LAMP TYPE
LOW PRESSURE MECURY LAMP
MAIN WAVELENGTH
254/185 nm
SAFETY DESIGN 1
CHAMBER TEMPERATURE ALARM
SAFETY DESIGN 2
CHAMBER OPEN INTERLOCK